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To date, SMA Fellows have published 366
articles in 289 journals while 51 articles have been accepted for publication in 43 journals. Some
articles are listed under more than one category. |
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AMM&NS Programme |
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Other SMA Research Projects |
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TiNi Shape Memory Alloy Thin Films for MEMS Applications
Journal Publications
- Fu Y. Q. & Du H. J., “Magnetron Sputtered TiNiCu Shape Memory Alloy Thin Film for MEMS Applications”, Materials and Process Integration for MEMS, pp. 71-87 (2002).
- Fu Y. Q., Du H. J. & Zhang S., “TiNi SMA Thin Films: Relationship Among Processing, Stress Evolution and Transformation Properties”, Surface and Coatings Technology, Vol. 167, No. 2-3, pp. 120-128 (2003).
- Fu Y. Q. & Du H. J., “Effects of Film Composition and Annealing on Residual Stress Evolution for Shape Memory TiNi Film”, Materials Science and Engineering A, Vol. 342, Issues 1-2, pp. 237-245 (2002).
- Fu Y. Q., Du H. J & Zhang S., “Application of TiNi Layer on TiNi Film to Improve Its Surface Properties”, Surface and Coatings Technology, Vol. 167, No. 2-3, pp. 129-136 (2003).
- Fu Y. Q., Du H. J. & Sun C. Q., “Interfacial Structure, Residual Stress and Adhesion of Diamond Coating on Titanium”, Thin Solid Films, Vol. 424, No. 1, pp. 107-114 (2003).
- Fu Y. Q., Du H. J., Gao S. & Yi S., “Mechanical Properties of TiNi Shape Memory Alloy Thin Films”, Materials Science Forum, Vol. 437, No. 4, pp. 37-40 (2003).
- Fu Y. Q., Du H. J., Huang W. & Hu M., “TiNi Film Based Shape Memory Alloy and Actuators”, International Journal of Computational Engineering Science (IJCES), Vol. 4, pp. 221-225 (2003).
- Fu Y. Q., Du H. J. & Zhang S., “Interfacial Structure and Adhesion of TiNi Films on Si/SiO2 Substrate”, Thin Solid Films, Vol. 444, pp. 85 (2003).
- Fu Y. Q. & Du H. J., “Magnetron Sputtered TiNiPt10 Shape Memory Alloy Thin Films”, Journal of Materials Science Letters, Vol. 22, pp. 531-533 (2003).
- Du H. J. & Fu Y. Q., “Deposition and Characterization of TiNiCuX Shape Memory Alloy Thin Films”, Surface and Coatings Technology, Vol. 176, pp. 182-187 (2004).
- Fu Y. Q., Du H., Huang W. M., Zhang S. & Hu M., “TiNi-Based Thin Films in MEMS Applications: A Review”, Sensors and Actuators A Physical, Vol. 112, pp. 395-408 (2004).
- Fu Y., Du H., Zhang S. & Ong S. E., “Effects of Silicon Nitride Interlayer on Phase Transformation and Adhesion of TiNi films”, Thin Solid Films, Vol. 476, pp. 352-357 (2005).
Conference Publications
- Fu Y. Q. & Du H. J., “Stress Generation and Recovery During Martensite Transformation for TiNi Films”, International Conference on Martensite Transformations 02, Helsinki, Finland, 9-14 June 2002.
- Fu Y. Q. & Du H. J., “Magnetron Sputtered TiNiCu Shape Memory Alloy Thin Films
with Different Cu Contents”, SPIE’s International Symposium on Smart Materials,
Smart Materials II, SPIE, Nano- and Micro Smart Systems, pp. 219-225, Melbourne, Australia, 16-18 December 2002.
- Fu Y. Q. & Du H. J., “Fabrication of Micromachined TiNi-Based Microgripper with Compliant Structure”, Proceedings of the SPIE - The International Society for Optical Engineering, Vol. 5116, pp. 38-47, Smart Sensors, Actuators, and MEMS, Maspalomas, Gran Canaria, Spain, SPIE-Int. Soc. Opt. Eng, USA, 19-21 May 2003.
- Fu Y. Q., Du H. J. & Zhang S., “Some Considerations on TiNi films for MEMS
Applications”, The 8th IUMRS International Conference on Advanced Materials
(IUMRS-ICAM 2003), Yokohama, Japan,
8-13 October 2003.
- Chen J., Fu Y. Q., Du H. J. & Zhang S., “TiNi1-xCux Shape Memory Alloy Thin
Films for Biopsy Application”, Proceedings
of International Conference on Precision
Engineering (ICoPE2003/04), pp. 579-586, Singapore, 2-5 March 2004.
- Du H. & Fu Y. Q., “Preparation of TiNiCu Thin Films for Biopsy Applications in Microcapsule Endoscopy”, SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems, Sydney, Australia, 12-15 December 2004 (invited paper).
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