Project Abstract:

Shape memory TiNi thin film has been recognized as a promising and high performance material in the field of micro-electromechanical system (MEMS) applications. The work output per volume of thin film SMA exceeds that of other micro-actuation mechanisms. In this project, TiNi based (TiNiCu, TiNiPt, TiNiPd, etc.) films are prepared using magnetron sputtering. Microstructure, mechanical properties and shape memory effects of the prepared thin films are characterized with the consideration of different process parameters. Based on the high-performance TiNi based thin films, different MEMS based structures (microcantilever, microgripper, microvalves and pumps, micromirror, etc.) will be designed and fabricated using MEMS processes.